IPM RAS / Structure / Staff / Klyuenkov Eugene

Klyuenkov Eugene

Head of the Laboratory of multilayer X-ray optics technology, member of scientific council of the IPM RAS, PhD in Pysics.

Personal data

Born on 4 March, 1953 in Nizhniy Novgorod.

Research interests

Physics of thin films, technology of multilayer x-ray optics; scientific instrument making.

Scientific activity includes the development of technology for production of multilayer structures for X-ray optics, the study of physical processes in multilayer structures based on ultrathin metal layers, development and manufacture of automated devices magnetron sputtering of x-ray multilayer coatings, development of manufacturing technology focusing (elliptic and parabolic) elements of the X-ray optics; development and research of multilayer thin-film filters with ultra-high transparency in the soft X-ray and extreme ultraviolet radiation, development and construction of stands for the diagnosis of multilayer structures for monitoring and correcting the shape of the surface of the X-ray optical elements with subnanometer accuracy, projection X-ray nanolithography.


  1. S.S. Andreev, A. D. Akhsakhalyan, M. A. Bibishkin, N. I. Chkhalo, S. V. Gaponov, S. A. Gusev, E. B. Kluenkov, K. A. Prokhorov, N. N. Salashchenko, F. Schäfers, S. Yu. Zuev. Multilayer optics for XUV spectral region: technology it and applications. Centr. Europ. Journ. of Phys. 2003. 1, p.191−209.
  2. A.A. Akhsakhalyan, A. D. Akhsakhalyan, A. I. Kharitonov, E. B. Kluenkov, V. A. Murav’ev, N. N. Salashchenko. Multilayer mirror systems to form hard X-ray beams. // Central European Journal of Physics 3 (2) 2005 163−177.

Contact detail

Phone: +7 (831) 417−94−60

E-mail: kluenkov@ipmras.ru

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