Klyuenkov Eugene
Head of the Laboratory of multilayer X-ray optics technology, member of scientific council of the IPM RAS, PhD in Pysics.
Personal data
Born on 4 March, 1953 in Nizhniy Novgorod.
Research interests
Physics of thin films, technology of multilayer x-ray optics; scientific instrument making.
Scientific activity includes the development of technology for production of multilayer structures for X-ray optics, the study of physical processes in multilayer structures based on ultrathin metal layers, development and manufacture of automated devices magnetron sputtering of x-ray multilayer coatings, development of manufacturing technology focusing (elliptic and parabolic) elements of the X-ray optics; development and research of multilayer thin-film filters with ultra-high transparency in the soft X-ray and extreme ultraviolet radiation, development and construction of stands for the diagnosis of multilayer structures for monitoring and correcting the shape of the surface of the X-ray optical elements with subnanometer accuracy, projection X-ray nanolithography.
Publications
- S.S. Andreev, A. D. Akhsakhalyan, M. A. Bibishkin, N. I. Chkhalo,
S. V. Gaponov ,S. A. Gusev ,E. B. Kluenkov ,K. A. Prokhorov ,N. N. Salashchenko , F. Schäfers, S. Yu. Zuev. Multilayer optics for XUV spectral region: technology it and applications. Centr. Europ. Journ. of Phys. 2003. 1, p.191−209. - A.A. Akhsakhalyan, A. D. Akhsakhalyan, A. I. Kharitonov, E. B. Kluenkov, V. A. Murav’ev, N. N. Salashchenko. Multilayer mirror systems to form hard X-ray beams. // Central European Journal of Physics 3 (2) 2005 163−177.
Contact detail
Phone: +7 (831) 417−94−60
E-mail: kluenkov@ipmras.ru
